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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using... Full description

1st Person: Zhang, Xiao-Sheng
Additional Corporate Bodies: SpringerLink (Online service)
Additional Persons: SpringerLink (Online service)
Type of Publication: Book
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2016, 2016
Edition: 1st ed. 2016
Series: Springer Theses, Recognizing Outstanding Ph.D. Research
Keywords: Microengineering
Electronics and Microelectronics, Instrumentation
Engineering
Energy Harvesting
Nanotechnology and Microengineering
Electronics
Nanotechnology
Microreactors
Nanotechnology
Online: Volltext
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